Abstract
Ultrashort pulse laser ablation has been investigated for noble metal targets: gold, silver and copper by use of commercially available titanium sapphire laser and chirped pulse amplifier. The pulse duration dependence of the ultrashort laser ablation characteristics in sub-picosecond regime has been shown for micro-machining application purpose. The application of two different ablation regimes is proposed. In order to know the obvious laser requirements, experimental results as well as theoretical description are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 509-516 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3885 |
| Publication status | Published - 2000 Jan 1 |
| Event | High-Power Laser Ablation II - Osaka, Jpn Duration: 1999 Nov 1 → 1999 Nov 5 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering