TY - JOUR
T1 - Pulsed laser deposition with rapid beam deflection by a galvanometer mirror scanner
AU - Maruyama, S.
AU - Sannodo, N.
AU - Harada, R.
AU - Anada, Y.
AU - Takahashi, R.
AU - Lippmaa, M.
AU - Matsumoto, Y.
N1 - Funding Information:
This work was financially supported by a Grant-in-Aid for Scientific Research (Grant Nos. 15H02021, 17H04895, and 26105002) from the Ministry of Education, Culture, Sports, Science, and Technology of Japan, the Advanced Low Carbon Technology Research and Development Program (ALCA), and JST-Mirai Program (Grant No. JPMJMI18G5) of the Japan Science and Technology Agency (JST), and Nippon Sheet Glass Foundation for Materials Science and Engineering. This work was carried out by the joint research in the Institute for Solid State Physics, the University of Tokyo, and the Laboratory for Materials and Structures, Tokyo Institute of Technology.
Publisher Copyright:
© 2019 Author(s).
PY - 2019/9/1
Y1 - 2019/9/1
N2 - A pulsed laser deposition system with rapid beam deflection (RBD-PLD) by a galvanometer mirror scanner has been developed for alternating ablation of multiple targets with a single laser instrument. In this system, the alternating deposition of different target materials is carried out by scanning the laser beam between the positionally fixed targets with a galvanometer mirror instead of mechanically switching the target positions on a fixed optical path of the laser beam as is done in conventional pulsed laser deposition (PLD) systems. Thus, the "wait" time required for switching target materials to be deposited, which typically takes several seconds in a conventional system, can be made as short as a few milliseconds. We demonstrate some of the advantages of this PLD system in several technologically important aspects of thin film synthesis: (1) fast fabrication of binary alloy films, (2) preparation of natural composition spread libraries, (3) effect of the target switching time on the deposition of volatile compounds, (4) control of the degree of mixing of two different materials in a film, and (5) efficient growth of compositionally graded thin films.
AB - A pulsed laser deposition system with rapid beam deflection (RBD-PLD) by a galvanometer mirror scanner has been developed for alternating ablation of multiple targets with a single laser instrument. In this system, the alternating deposition of different target materials is carried out by scanning the laser beam between the positionally fixed targets with a galvanometer mirror instead of mechanically switching the target positions on a fixed optical path of the laser beam as is done in conventional pulsed laser deposition (PLD) systems. Thus, the "wait" time required for switching target materials to be deposited, which typically takes several seconds in a conventional system, can be made as short as a few milliseconds. We demonstrate some of the advantages of this PLD system in several technologically important aspects of thin film synthesis: (1) fast fabrication of binary alloy films, (2) preparation of natural composition spread libraries, (3) effect of the target switching time on the deposition of volatile compounds, (4) control of the degree of mixing of two different materials in a film, and (5) efficient growth of compositionally graded thin films.
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U2 - 10.1063/1.5104291
DO - 10.1063/1.5104291
M3 - Article
C2 - 31575232
AN - SCOPUS:85072229353
SN - 0034-6748
VL - 90
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
IS - 9
M1 - 093901
ER -