TY - JOUR
T1 - Quad Mass Resonator with Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam
AU - Chen, Jianlin
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
Manuscript received September 18, 2020; revised March 5, 2021; accepted March 9, 2021. Date of publication March 22, 2021; date of current version June 1, 2021. This work was supported in part by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). The work of Jianlin Chen was supported by the Graduate Program for Integration of Mechanical Systems (GP-Mech) in Tohoku University. Subject Editor R. N. Candler. (Corresponding author: Takashiro Tsukamoto.) The authors are with the Department of Robotics, Tohoku University, Sendai 980-8579, Japan (e-mail: chenjl@mems.mech.tohoku.ac.jp; t_tsuka@mems.mech.tohoku.ac.jp; tanaka@mems.mech.tohoku.ac.jp).
Publisher Copyright:
© 1992-2012 IEEE.
PY - 2021/6
Y1 - 2021/6
N2 - This paper reports a frequency trimming method for a resonator used in a quad-mass gyroscopes (QMG) by focused ion beam (FIB) etching. The effects of the suspension stiffness, coupling stiffness and mass perturbations on the anti-phase mode resonant frequency were studied theoretically and numerically, proving the effectiveness and merit of the suspension stiffness trimming. The asymmetry caused by the suspension stiffness mismatch was further considered and its effects on frequency and Q-factor were investigated. Then the relationship between the trimming geometry of the suspension springs and the resonant frequency was studied by finite element analysis (FEA). The proposed trimming was demonstrated by using a QMG device fabricated by a standard SOI process. The resonant frequency mismatch was initially about 2810 ppm. After the proposed FIB trimming on the suspension springs, the frequency mismatch decreased to be as small as 3 ppm and the uncertainties do not exceed 75 ppm in the variation of ambient temperature between ±2 K. A slight change of Q-factor was observed in the trimmed axis from 100,000 to 90,000.
AB - This paper reports a frequency trimming method for a resonator used in a quad-mass gyroscopes (QMG) by focused ion beam (FIB) etching. The effects of the suspension stiffness, coupling stiffness and mass perturbations on the anti-phase mode resonant frequency were studied theoretically and numerically, proving the effectiveness and merit of the suspension stiffness trimming. The asymmetry caused by the suspension stiffness mismatch was further considered and its effects on frequency and Q-factor were investigated. Then the relationship between the trimming geometry of the suspension springs and the resonant frequency was studied by finite element analysis (FEA). The proposed trimming was demonstrated by using a QMG device fabricated by a standard SOI process. The resonant frequency mismatch was initially about 2810 ppm. After the proposed FIB trimming on the suspension springs, the frequency mismatch decreased to be as small as 3 ppm and the uncertainties do not exceed 75 ppm in the variation of ambient temperature between ±2 K. A slight change of Q-factor was observed in the trimmed axis from 100,000 to 90,000.
KW - Quad mass resonator
KW - focused ion beam
KW - frequency trimming
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U2 - 10.1109/JMEMS.2021.3065720
DO - 10.1109/JMEMS.2021.3065720
M3 - Article
AN - SCOPUS:85103273781
SN - 1057-7157
VL - 30
SP - 392
EP - 400
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 3
M1 - 9382848
ER -