Quantification of electron diffraction with imaging plate

Electron diffraction patterns of a Cu₃Pd alloy were quantitatively analyzed by making good use of a wide dynamic range and good linearity of the imaging plate dedicated to an electron microscope. Intensities of both fundamental and superlattice reflections of the alloy having a one-dimensional long-period superstructure were measured in situ as a function of the temperature. The intensity changes of the superlattice reflections quantitatively evaluated clearly show the characteristic disordering process of the Cu₃Pd alloy. It was demonstrated that quantitative structure analysis by electron diffraction patterns is possible with the use of the imaging plate if the dynamical diffraction effect is taken into account.