Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy

Kotaro Hirose; Katsuto Tanahashi; Hidetaka Takato; Yasuo Cho

doi:10.1109/IPFA.2018.8452172

Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy

Kotaro Hirose, Katsuto Tanahashi, Hidetaka Takato, Yasuo Cho

Information Devices Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.

Original language	English
Title of host publication	IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781538649299
DOIs	https://doi.org/10.1109/IPFA.2018.8452172
Publication status	Published - 2018 Aug 30
Event	25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018 - Singapore, Singapore Duration: 2018 Jul 16 → 2018 Jul 19

Publication series

Name	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
Volume	2018-July

Other

Other	25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018
Country/Territory	Singapore
City	Singapore
Period	18/7/16 → 18/7/19

Keywords

Active dopant distribution
Effective diffusivity
Phosphorus-implanted emitter
Scanning nonlinear dielectric microscopy
Silicon solar cell

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/IPFA.2018.8452172

Cite this

Hirose, K., Tanahashi, K., Takato, H., & Cho, Y. (2018). Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy. In IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits [8452172] (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA; Vol. 2018-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPFA.2018.8452172

Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy. / Hirose, Kotaro; Tanahashi, Katsuto; Takato, Hidetaka et al.
IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits. Institute of Electrical and Electronics Engineers Inc., 2018. 8452172 (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA; Vol. 2018-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hirose, K, Tanahashi, K, Takato, H & Cho, Y 2018, Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy. in IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits., 8452172, Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA, vol. 2018-July, Institute of Electrical and Electronics Engineers Inc., 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018, Singapore, Singapore, 18/7/16. https://doi.org/10.1109/IPFA.2018.8452172

Hirose K, Tanahashi K, Takato H, Cho Y. Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy. In IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits. Institute of Electrical and Electronics Engineers Inc. 2018. 8452172. (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA). doi: 10.1109/IPFA.2018.8452172

Hirose, Kotaro ; Tanahashi, Katsuto ; Takato, Hidetaka et al. / Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy. IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits. Institute of Electrical and Electronics Engineers Inc., 2018. (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA).

@inproceedings{edde18c6707d446bb6586f5320ef8aff,

title = "Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy",

abstract = "The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.",

keywords = "Active dopant distribution, Effective diffusivity, Phosphorus-implanted emitter, Scanning nonlinear dielectric microscopy, Silicon solar cell",

author = "Kotaro Hirose and Katsuto Tanahashi and Hidetaka Takato and Yasuo Cho",

note = "Funding Information: This study was supported in part by a Grant-in-Aid for Scientific Research (S) (No. 16H06360) from the Japan Society for Promotion of Science (JSPS). Publisher Copyright: {\textcopyright} 2018 IEEE.; 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018 ; Conference date: 16-07-2018 Through 19-07-2018",

year = "2018",

month = aug,

day = "30",

doi = "10.1109/IPFA.2018.8452172",

language = "English",

isbn = "9781538649299",

series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits",

}

TY - GEN

T1 - Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy

AU - Hirose, Kotaro

AU - Tanahashi, Katsuto

AU - Takato, Hidetaka

AU - Cho, Yasuo

N1 - Funding Information: This study was supported in part by a Grant-in-Aid for Scientific Research (S) (No. 16H06360) from the Japan Society for Promotion of Science (JSPS). Publisher Copyright: © 2018 IEEE.

PY - 2018/8/30

Y1 - 2018/8/30

N2 - The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.

AB - The carrier distribution in solar cell is important evaluation target. Scanning nonlinear dielectric microscopy is applied to the cross section of phosphorus implanted emitter in monocrystalline silicon solar cell and visualizes the carrier distribution quantitatively. The effective diffusivities of phosphorus are estimated from the experimental results. Then, the three-dimensional carrier distribution is simulated. The experimental and simulation results show good correlation.

KW - Active dopant distribution

KW - Effective diffusivity

KW - Phosphorus-implanted emitter

KW - Scanning nonlinear dielectric microscopy

KW - Silicon solar cell

UR - http://www.scopus.com/inward/record.url?scp=85053905797&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053905797&partnerID=8YFLogxK

U2 - 10.1109/IPFA.2018.8452172

DO - 10.1109/IPFA.2018.8452172

M3 - Conference contribution

AN - SCOPUS:85053905797

SN - 9781538649299

T3 - Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

BT - IPFA 2018 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 25th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2018

Y2 - 16 July 2018 through 19 July 2018

ER -

Quantitative evaluation of carrier distribution in silicon solar cell using scanning nonlinear dielectric microscopy

Abstract

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Keywords

ASJC Scopus subject areas

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