Quantitative measurement of linear dielectric constant using scanning nonlinear dielectric microscopy with electro-conductive cantilever

A quantitative measurement of linear dielectric constant was conducted using a scanning nonlinear dielectric microscopy (SNDM) with electro-conductive cantilever. The average value of the linear dielectric constant of the specimen in the area was obtained under the beam of the cantilever using a measured standard curve. The tip sensitivity of the cantilever was calibrated using the standard sample with the macroscopic distribution of the linear dielectric constant. Using the calibration data, the dielectric check distribution of TiO₂-Bi₂Ti₄O₁₁ ceramics was measured quantitatively.