@inproceedings{34a8736076c745e2a7241d326fa8663f,
title = "Quantum chemical molecular dynamics simulations of mechano-chemical reactions during chemical mechanical polishing processes for semiconductor devices",
author = "Kentaro Kawaguchi and Takeshi Ishikawa and Yuji Higuchi and Nobuki Ozawa and Momoji Kubo",
year = "2013",
month = jan,
day = "1",
language = "English",
series = "5th World Tribology Congress, WTC 2013",
publisher = "Politecnico di Torino (DIMEAS)",
pages = "3075--3076",
booktitle = "5th World Tribology Congress, WTC 2013",
note = "5th World Tribology Congress, WTC 2013 ; Conference date: 08-09-2013 Through 13-09-2013",
}