TY - GEN
T1 - Quartz-crystal cantilevered resonator for nanometric sensing
AU - Rin, Ikusei
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2005/11/9
Y1 - 2005/11/9
N2 - A thin rectangle cantilevered resonator of AT-cut quartz crystal has been developed for force and nanometric sensing. The cantilevers with thicknesses of 15-27 μm were fabricated by deep reactive ion etching (deep-RIE). Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically exited and detected. Also flexural and torsional vibrations can be exited and piezoelectrically detected despite of the weak electromechanical coupling. Using flexural and torsional modes, scanning probe microscopy for topographic imaging is demonstrated.
AB - A thin rectangle cantilevered resonator of AT-cut quartz crystal has been developed for force and nanometric sensing. The cantilevers with thicknesses of 15-27 μm were fabricated by deep reactive ion etching (deep-RIE). Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically exited and detected. Also flexural and torsional vibrations can be exited and piezoelectrically detected despite of the weak electromechanical coupling. Using flexural and torsional modes, scanning probe microscopy for topographic imaging is demonstrated.
KW - AT-cut quartz crystal
KW - Force sensor
KW - Quartz crystal resonator
KW - Scanning probe microscopy
UR - http://www.scopus.com/inward/record.url?scp=27544479504&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544479504&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:27544479504
SN - 0780389948
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 247
EP - 251
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -