TY - JOUR
T1 - Radio frequency magnetic near field measurements of coplanar waveguide simulated power and ground lines in radio frequency integrated circuits using a MFM tip
AU - Endo, Yasushi
AU - Fukushima, Masaaki
AU - Arai, Kaoru
AU - Shimada, Yutaka
AU - Yamaguchi, Masahiro
N1 - Funding Information:
This work was supported in part by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology of Japan, and by Special Co-ordination Funds for Promoting Science and Technology from the Formation of Innovation Center for Fusion of Advanced Technologies. This work was also supported in part by a government project from the Japanese Ministry of Internal Affairs and Communications (Development of Technical Examination Services Concerning Frequency Crowding) and by KAKENHI (No. 23686047 and No. 24656197) from MEXT, Japan.
PY - 2012
Y1 - 2012
N2 - This paper describes our study on high-resolution measurements of the distribution of the radio frequency (RF) magnetic near field from a coplanar waveguide (CPW) with a size similar to power and ground lines in radio frequency integrated circuit chips using a magnetic force microscope tip and amplitude modulation of the line current. Cantilever resonance frequency modulation of approximately 25 kHz supplies the CPW with current and carrier frequencies up to 0.1 GHz. The CPW has a signal line width of 3 μm and a ground line width of 50 μm. The oscillation amplitudes of the tip with and without a DC magnetic field indicates that the distribution of the RF magnetic near field in the proximity of the CPW can be observed for a carrier frequency up to 0.1 GHz. This result also suggests that this method has potential as a new technique for high-resolution RF field measurements.
AB - This paper describes our study on high-resolution measurements of the distribution of the radio frequency (RF) magnetic near field from a coplanar waveguide (CPW) with a size similar to power and ground lines in radio frequency integrated circuit chips using a magnetic force microscope tip and amplitude modulation of the line current. Cantilever resonance frequency modulation of approximately 25 kHz supplies the CPW with current and carrier frequencies up to 0.1 GHz. The CPW has a signal line width of 3 μm and a ground line width of 50 μm. The oscillation amplitudes of the tip with and without a DC magnetic field indicates that the distribution of the RF magnetic near field in the proximity of the CPW can be observed for a carrier frequency up to 0.1 GHz. This result also suggests that this method has potential as a new technique for high-resolution RF field measurements.
KW - Amplitude modulation
KW - RF magnetic near field
KW - coplanar waveguide (CPW)
KW - magnetic force microscope (MFM)
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U2 - 10.1109/TMAG.2012.2204968
DO - 10.1109/TMAG.2012.2204968
M3 - Article
AN - SCOPUS:84867827681
SN - 0018-9464
VL - 48
SP - 3666
EP - 3669
JO - IEEE Transactions on Magnetics
JF - IEEE Transactions on Magnetics
IS - 11
M1 - 6332711
ER -