Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

K. Abe; S. Sugawa; S. Watabe; N. Miyamoto; A. Teramoto; Y. Kamata; K. Shibusawa; M. Toita; T. Ohmi

doi:10.1109/VLSIT.2007.4339696

Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

K. Abe, S. Sugawa, S. Watabe, N. Miyamoto, A. Teramoto, Y. Kamata, K. Shibusawa, M. Toita, T. Ohmi

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Conference article › peer-review

45 Citations (Scopus)

Abstract

In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (10⁶ MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.

Original language	English
Article number	4339696
Pages (from-to)	210-211
Number of pages	2
Journal	Digest of Technical Papers - Symposium on VLSI Technology
DOIs	https://doi.org/10.1109/VLSIT.2007.4339696
Publication status	Published - 2007
Event	2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan Duration: 2007 Jun 12 → 2007 Jun 14

Keywords

RTS
TEG and characteristic fluctuation

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10.1109/VLSIT.2007.4339696

Cite this

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title = "Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs",

abstract = "In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.",

keywords = "RTS, TEG and characteristic fluctuation",

author = "K. Abe and S. Sugawa and S. Watabe and N. Miyamoto and A. Teramoto and Y. Kamata and K. Shibusawa and M. Toita and T. Ohmi",

year = "2007",

doi = "10.1109/VLSIT.2007.4339696",

language = "English",

pages = "210--211",

journal = "Digest of Technical Papers - Symposium on VLSI Technology",

issn = "0743-1562",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2007 Symposium on VLSI Technology, VLSIT 2007 ; Conference date: 12-06-2007 Through 14-06-2007",

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TY - JOUR

T1 - Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

AU - Abe, K.

AU - Sugawa, S.

AU - Watabe, S.

AU - Miyamoto, N.

AU - Teramoto, A.

AU - Kamata, Y.

AU - Shibusawa, K.

AU - Toita, M.

AU - Ohmi, T.

PY - 2007

Y1 - 2007

N2 - In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.

AB - In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.

KW - RTS

KW - TEG and characteristic fluctuation

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DO - 10.1109/VLSIT.2007.4339696

M3 - Conference article

AN - SCOPUS:47249097466

SN - 0743-1562

SP - 210

EP - 211

JO - Digest of Technical Papers - Symposium on VLSI Technology

JF - Digest of Technical Papers - Symposium on VLSI Technology

M1 - 4339696

T2 - 2007 Symposium on VLSI Technology, VLSIT 2007

Y2 - 12 June 2007 through 14 June 2007

ER -

Random telegraph signal statistical analysis using a very large-scale array TEG with 1M MOSFETs

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Keywords

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