In this paper, we propose an advanced Test Element Group (TEG) which can measure a large number (106 MOSFETs) of electrical characteristics or noise characteristics with high accuracy in a very short time (0.2 sec/frame). We analyzed fluctuations of these characteristics statistically using this TEG, as the result, we confirmed that frequencies of the Random Telegraph Signal (RTS) appearance and amplitudes of the RTS become larger with the scaling-down from statistical analysis. We did not find a correlation between DC characteristic fluctuations and random noise which is caused by RTS. (.
|Number of pages||2|
|Journal||Digest of Technical Papers - Symposium on VLSI Technology|
|Publication status||Published - 2007|
|Event||2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan|
Duration: 2007 Jun 12 → 2007 Jun 14
- TEG and characteristic fluctuation