Abstract
Chemical reactive fields of non-thermal plasma flowing were clarified by using both experimental and numerical methods in the present study. The plasma was generated by using needle-plate electrodes with applied voltage of 12 kV and a square wave of 20 Hz. The operating gas was air injected at a rate of 1-10 Sl/min through a rectangular reactor with a 3×7 mm cross section. Distributions of gas velocity, gas temperature and NO concentration were clarified by experimental and numerical methods. The NO concentration was strongly influenced by the gas flow rate, because the N concentration was rapidly decreased in the case of small gas flow rate.
Original language | English |
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Pages (from-to) | 78-83 |
Number of pages | 6 |
Journal | Thin Solid Films |
Volume | 457 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2004 Jun 1 |
Event | 16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan Duration: 2003 Jun 4 → 2003 Jun 5 |
Keywords
- Glow discharge
- Nitrogen dioxide
- Oxygen
- Reaction kinetics