Reactive force-field molecular dynamics simulation for the surface reaction of SiHx (x = 2–4) species on Si(1 0 0)-(2 × 1):H surfaces in chemical vapor deposition processes

Naoya Uene, Takuya Mabuchi, Masaru Zaitsu, Shigeo Yasuhara, Takashi Tokumasu

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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Chemistry