TY - JOUR
T1 - Real-time observation of film structure using X-ray waveguide phenomenon
AU - Hayashi, Kouichi
AU - Hu, Wen
AU - Nakamura, Takahiro
AU - Takenaka, Hisataka
AU - Suzuki, Kosuke
AU - Ito, Masahisa
PY - 2009
Y1 - 2009
N2 - The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film, and followed its variation over time due to radiation damage induced by the strong white X-ray beam. The rapid PMMA layer compression, which occurring during the first 200 s after the irradiation, was sensitively monitored by the present method.
AB - The X-ray waveguide phenomenon was applied for quick evaluation of film structure. By irradiating synchrotron radiation white X-rays on a Si/poly(methyl methacrylate) (PMMA)/Si multilayer, we observed the spectrum of the guided X-rays, which provides information on the thickness and density of the film, and followed its variation over time due to radiation damage induced by the strong white X-ray beam. The rapid PMMA layer compression, which occurring during the first 200 s after the irradiation, was sensitively monitored by the present method.
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U2 - 10.1143/JJAP.48.110207
DO - 10.1143/JJAP.48.110207
M3 - Article
AN - SCOPUS:73849092562
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 11
M1 - 110207
ER -