Realization of Desirable Microstructure in Functional Magnetic Thin Films by Controlling the Impurities in Sputtering Process

Migaku Takahashi, Masakiyo Tsunoda, David D. Djayaprawira

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	631-638
Number of pages	8
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	44
Issue number	7
DOIs	https://doi.org/10.3131/jvsj.44.631
Publication status	Published - 2001 Jan

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title = "Realization of Desirable Microstructure in Functional Magnetic Thin Films by Controlling the Impurities in Sputtering Process",

author = "Migaku Takahashi and Masakiyo Tsunoda and Djayaprawira, {David D.}",

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