Realization of Desirable Microstructure in Functional Magnetic Thin Films by Controlling the Impurities in Sputtering Process

Migaku Takahashi, Masakiyo Tsunoda, David D. Djayaprawira

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)631-638
Number of pages8
JournalShinku/Journal of the Vacuum Society of Japan
Issue number7
Publication statusPublished - 2001 Jan

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