Abstract
This article summarizes recent advances in an emerging three-dimensional (3D) imaging technique, electron tomography. We will put particular emphasis on electron tomography for μm-size volume data with the spatial resolution of the order of 10 nm. This technique provides new insights into "meso-scale" structural information that has been lost over the past several years.
Original language | English |
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Pages (from-to) | 666-668 |
Number of pages | 3 |
Journal | Kobunshi |
Volume | 62 |
Issue number | 11 |
Publication status | Published - 2013 Nov |
Keywords
- Electron tomography
- Meso-scale structural observations
- Scanning electron microscopy
- Three-dimensional image analysis