TY - GEN
T1 - Recent nano-precision ductile machining technology for advanced optical applications
AU - Yan, Jiwang
AU - Kuriyagawa, Tsunemoto
PY - 2006
Y1 - 2006
N2 - Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.
AB - Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.
UR - http://www.scopus.com/inward/record.url?scp=85088756778&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85088756778&partnerID=8YFLogxK
U2 - 10.1364/oft.2006.oftud4
DO - 10.1364/oft.2006.oftud4
M3 - Conference contribution
AN - SCOPUS:85088756778
SN - 1557528187
SN - 9781557528186
T3 - Optics InfoBase Conference Papers
BT - Optical Fabrication and Testing, OFT 2006
PB - Optical Society of America (OSA)
T2 - Optical Fabrication and Testing, OFT 2006
Y2 - 10 October 2006 through 10 October 2006
ER -