Abstract
In this paper, we propose microprobe-based electrical and thermal recording techniques for the application of high-density data storage. A microheater integrated at the free end of a thermal microprobe is formed by diffusion of boron for 3 hrs at 1160°C and it is supported by two contuctive silicon legs. When flowing a pulsed current through the legs, the heater is electrically heated up in a short time. Primary experiments for the electrical and thermal recording are evaluated using a sol-gel processed PZT and AgInSbTe thin films as a storage medium. For electrical recording on the PZT film, a voltage pulse is applied between a conductive tip and the PZT film. The nano-sized ferroelectric domains are easily switched by the applied voltage. The smallest marks were below 100 nm in diameter, which correspond to bit densities over 70 Gb/in2. For the thermal recording on the AgInSbTe, the conductive tip is Joule heated by flowing a current and then the heated tip makes a local phase change (amorphous to crystalline or amorphous to crystalline) of the AgInSbTe thin film. To read the formed mark, we measure an electrical resistance between a bottom electrode of AgInSbTe and the conductive tip because the electrical resistance of amorphous state is higher than that of the crystalline state.
| Original language | English |
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| Pages | 685-688 |
| Number of pages | 4 |
| Publication status | Published - 2002 Jan 1 |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24 |
Other
| Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
|---|---|
| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 02/1/20 → 02/1/24 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering