Relative sensitivity factors of aluminum, silicon and phosphorus against iron, and those of titanium, vanadium, chromium, iron and nickel against silicon for AES

Kichinosuke Hirokawa; Shigeru Suzuki; Hiroshi Kimura

doi:10.1016/0368-2048(86)80009-3

Relative sensitivity factors of aluminum, silicon and phosphorus against iron, and those of titanium, vanadium, chromium, iron and nickel against silicon for AES

Kichinosuke Hirokawa, Shigeru Suzuki, Hiroshi Kimura

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

Abstract

Relative Sensitivity Factors (RFs) for Fe, P, A1, Ti, V, Cr, Ni and Si Auger peaks are reported. Care must be taken when using RFs values for compounds owing to matrix effects.

Original language	English
Pages (from-to)	91-95
Number of pages	5
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	40
Issue number	1
DOIs	https://doi.org/10.1016/0368-2048(86)80009-3
Publication status	Published - 1986

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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10.1016/0368-2048(86)80009-3

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Relative sensitivity factors of aluminum, silicon and phosphorus against iron, and those of titanium, vanadium, chromium, iron and nickel against silicon for AES. / Hirokawa, Kichinosuke; Suzuki, Shigeru; Kimura, Hiroshi.
In: Journal of Electron Spectroscopy and Related Phenomena, Vol. 40, No. 1, 1986, p. 91-95.

Research output: Contribution to journal › Article › peer-review

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title = "Relative sensitivity factors of aluminum, silicon and phosphorus against iron, and those of titanium, vanadium, chromium, iron and nickel against silicon for AES",

abstract = "Relative Sensitivity Factors (RFs) for Fe, P, A1, Ti, V, Cr, Ni and Si Auger peaks are reported. Care must be taken when using RFs values for compounds owing to matrix effects.",

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AU - Kimura, Hiroshi

PY - 1986

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Relative sensitivity factors of aluminum, silicon and phosphorus against iron, and those of titanium, vanadium, chromium, iron and nickel against silicon for AES

Abstract

ASJC Scopus subject areas

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