Remaining problems in the combined XPS/UPS/FES System

H. Yamaguchi; S. Nozue; R. Muraoka; Y. Kudo; T. Masuzawa; T. Yamada; M. Kudo; Y. Takakuwa; W. J. Chun; K. Okano

doi:10.1109/IVNC.2009.5271836

Remaining problems in the combined XPS/UPS/FES System

H. Yamaguchi, S. Nozue, R. Muraoka, Y. Kudo, T. Masuzawa, T. Yamada, M. Kudo, Y. Takakuwa, W. J. Chun, K. Okano

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Pages	73-74
Number of pages	2
DOIs	https://doi.org/10.1109/IVNC.2009.5271836
Publication status	Published - 2009
Event	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 - Hamamatsu, Japan Duration: 2009 Jul 20 → 2009 Jul 24

Publication series

Name	Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Other

Other	2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009
Country/Territory	Japan
City	Hamamatsu
Period	09/7/20 → 09/7/24

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/IVNC.2009.5271836

Cite this

Yamaguchi, H., Nozue, S., Muraoka, R., Kudo, Y., Masuzawa, T., Yamada, T., Kudo, M., Takakuwa, Y., Chun, W. J., & Okano, K. (2009). Remaining problems in the combined XPS/UPS/FES System. In Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009 (pp. 73-74). [5271836] (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009). https://doi.org/10.1109/IVNC.2009.5271836

Remaining problems in the combined XPS/UPS/FES System. / Yamaguchi, H.; Nozue, S.; Muraoka, R. et al.

Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009. 2009. p. 73-74 5271836 (Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamaguchi, H, Nozue, S, Muraoka, R, Kudo, Y, Masuzawa, T, Yamada, T, Kudo, M, Takakuwa, Y, Chun, WJ & Okano, K 2009, Remaining problems in the combined XPS/UPS/FES System. in Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009., 5271836, Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, pp. 73-74, 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009, Hamamatsu, Japan, 09/7/20. https://doi.org/10.1109/IVNC.2009.5271836

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AU - Yamada, T.

AU - Kudo, M.

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Remaining problems in the combined XPS/UPS/FES System

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Other

ASJC Scopus subject areas

Access to Document

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