Abstract
This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the gird surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths of a hundred micrometers and amplitudes of a hundred nanometers. The master surface is fabricated on a diamond turning machine equipped with a fast tool servo. Two kinds of replication methods, the hot embossing and UV casting are employed for replicating the grid surface on polymer materials. The replication on a glass plate is also carried out by UV-casting. The replication systems and some experimental results are presented.
| Original language | English |
|---|---|
| Article number | 60520P |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 6052 |
| DOIs | |
| Publication status | Published - 2005 Dec 1 |
| Event | Optomechatronic Systems Control - Sappora, Japan Duration: 2005 Dec 5 → 2005 Dec 7 |
Keywords
- Glass
- Hot embossing
- Metrology surface
- Polymer materials
- Replication
- UV-casting
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering