The resonance frequency shifts of a glass thin plate vibrated by a photothermal effect have been measured in the pressure region from 10-4to 760 Torr for He, Ne, Ar, Kr, and Xe gas. The frequency shift in the pressure region above 100 Torr is caused by the viscous drag of the gas and that below 1 Torr is due to the thermal conduction of the gas.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - 1991 Jul