Resonant acoustic microsensor for photoacoustic detection

Imran Latif; Zhonglie An; Takahito Ono

doi:10.1109/NANO.2016.7751482

Resonant acoustic microsensor for photoacoustic detection

Imran Latif, Zhonglie An, Takahito Ono

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper describes the development of a photoacoustic microsensor for noninvasive glucose monitoring in human blood. The microsensor, based on capacitive sensing, is comprised of a resonant type cantilevered sensing element, sensitive to acoustic pressure and a rigid back plate electrode. Both parts of the sensor are fabricated separately. To eliminate external biasing requirement, an electret is formed on the back plate electrode using CYTOP. The fabricated sensing element and the back plate electrode are packaged in a housing for evaluation. In this study three different types of cantilevered sensing structures have been designed and tested. Based on the experimental study of the cantilever structures a novel photoacoustic microsensor has been fabricated and evaluated.

Original language	English
Title of host publication	16th International Conference on Nanotechnology - IEEE NANO 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	925-927
Number of pages	3
ISBN (Electronic)	9781509039142
DOIs	https://doi.org/10.1109/NANO.2016.7751482
Publication status	Published - 2016 Nov 21
Event	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan Duration: 2016 Aug 22 → 2016 Aug 25

Publication series

Name	16th International Conference on Nanotechnology - IEEE NANO 2016

Conference

Conference	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Country/Territory	Japan
City	Sendai
Period	16/8/22 → 16/8/25

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10.1109/NANO.2016.7751482

Cite this

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title = "Resonant acoustic microsensor for photoacoustic detection",

abstract = "This paper describes the development of a photoacoustic microsensor for noninvasive glucose monitoring in human blood. The microsensor, based on capacitive sensing, is comprised of a resonant type cantilevered sensing element, sensitive to acoustic pressure and a rigid back plate electrode. Both parts of the sensor are fabricated separately. To eliminate external biasing requirement, an electret is formed on the back plate electrode using CYTOP. The fabricated sensing element and the back plate electrode are packaged in a housing for evaluation. In this study three different types of cantilevered sensing structures have been designed and tested. Based on the experimental study of the cantilever structures a novel photoacoustic microsensor has been fabricated and evaluated.",

author = "Imran Latif and Zhonglie An and Takahito Ono",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 ; Conference date: 22-08-2016 Through 25-08-2016",

year = "2016",

month = nov,

day = "21",

doi = "10.1109/NANO.2016.7751482",

language = "English",

series = "16th International Conference on Nanotechnology - IEEE NANO 2016",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "925--927",

booktitle = "16th International Conference on Nanotechnology - IEEE NANO 2016",

address = "United States",

}

Latif, I, An, Z & Ono, T 2016, Resonant acoustic microsensor for photoacoustic detection. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751482, 16th International Conference on Nanotechnology - IEEE NANO 2016, Institute of Electrical and Electronics Engineers Inc., pp. 925-927, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751482

Resonant acoustic microsensor for photoacoustic detection. / Latif, Imran; An, Zhonglie; Ono, Takahito.
16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 925-927 7751482 (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Resonant acoustic microsensor for photoacoustic detection

AU - Latif, Imran

AU - An, Zhonglie

AU - Ono, Takahito

PY - 2016/11/21

Y1 - 2016/11/21

N2 - This paper describes the development of a photoacoustic microsensor for noninvasive glucose monitoring in human blood. The microsensor, based on capacitive sensing, is comprised of a resonant type cantilevered sensing element, sensitive to acoustic pressure and a rigid back plate electrode. Both parts of the sensor are fabricated separately. To eliminate external biasing requirement, an electret is formed on the back plate electrode using CYTOP. The fabricated sensing element and the back plate electrode are packaged in a housing for evaluation. In this study three different types of cantilevered sensing structures have been designed and tested. Based on the experimental study of the cantilever structures a novel photoacoustic microsensor has been fabricated and evaluated.

AB - This paper describes the development of a photoacoustic microsensor for noninvasive glucose monitoring in human blood. The microsensor, based on capacitive sensing, is comprised of a resonant type cantilevered sensing element, sensitive to acoustic pressure and a rigid back plate electrode. Both parts of the sensor are fabricated separately. To eliminate external biasing requirement, an electret is formed on the back plate electrode using CYTOP. The fabricated sensing element and the back plate electrode are packaged in a housing for evaluation. In this study three different types of cantilevered sensing structures have been designed and tested. Based on the experimental study of the cantilever structures a novel photoacoustic microsensor has been fabricated and evaluated.

UR - http://www.scopus.com/inward/record.url?scp=85006929857&partnerID=8YFLogxK

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M3 - Conference contribution

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T3 - 16th International Conference on Nanotechnology - IEEE NANO 2016

SP - 925

EP - 927

BT - 16th International Conference on Nanotechnology - IEEE NANO 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016

Y2 - 22 August 2016 through 25 August 2016

ER -

Resonant acoustic microsensor for photoacoustic detection

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