TY - GEN
T1 - Resonant magnetic sensor using magnetic gradient field formed by permalloy concentrator
AU - Suwa, Wataru
AU - Inomata, Naoki
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm3 is placed between the gap of the magnetic concentrator, and a 10μm-diameter magnetic particle is placed on the tip of the cantilever. The resonant frequency changes as the magnetic force is impinged on the magnetic particle by the magnetic field gradient formed by the magnetic concentrator. The extremal magnetic field can be measured from the resonant frequency change. The resonant magnetic sensor is fabricated by conventional microfabrication techniques, and the magnetic force-depended resonant frequency change is evaluated under the self-oscillation condition. The experimental magnetic resolution was estimated to be 5.1×10-7 T considering the experimental noise level (3.29 ppm). By downsizing the cantilever and optimizing the permalloy concentrator, this resonant magnetic sensor has a feasibility to achieve a magnetic field resolution of 1.7 ×10-14 T.
AB - This paper reports a novel resonant magnetic sensor using a magnetic gradient field formed by a magnetic concentrator consisted of asymmetric and facing two permalloy plates. A Si cantilever with a size of 5×15×200 μm3 is placed between the gap of the magnetic concentrator, and a 10μm-diameter magnetic particle is placed on the tip of the cantilever. The resonant frequency changes as the magnetic force is impinged on the magnetic particle by the magnetic field gradient formed by the magnetic concentrator. The extremal magnetic field can be measured from the resonant frequency change. The resonant magnetic sensor is fabricated by conventional microfabrication techniques, and the magnetic force-depended resonant frequency change is evaluated under the self-oscillation condition. The experimental magnetic resolution was estimated to be 5.1×10-7 T considering the experimental noise level (3.29 ppm). By downsizing the cantilever and optimizing the permalloy concentrator, this resonant magnetic sensor has a feasibility to achieve a magnetic field resolution of 1.7 ×10-14 T.
KW - Magnetic concentrator
KW - Magnetic gradient
KW - Permalloy
KW - Resonant magnetic sensor
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U2 - 10.1109/TRANSDUCERS.2017.7994175
DO - 10.1109/TRANSDUCERS.2017.7994175
M3 - Conference contribution
AN - SCOPUS:85029368817
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 822
EP - 825
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -