Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

M. Nakano; S. Sato; F. Yamashita; T. Honda; J. Yamasaki; K. Ishiyama; M. Itakura; J. Fidler; T. Yanai; H. Fukunaga

doi:10.1109/TMAG.2007.893778

Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

M. Nakano, S. Sato, F. Yamashita, T. Honda, J. Yamasaki, K. Ishiyama, M. Itakura, J. Fidler, T. Yanai, H. Fukunaga

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35 Citations (Scopus)

Abstract

Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)_max of approximately 120 kJ/m³, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

Original language	English
Pages (from-to)	2672-2676
Number of pages	5
Journal	IEEE Transactions on Magnetics
Volume	43
Issue number	6
DOIs	https://doi.org/10.1109/TMAG.2007.893778
Publication status	Published - 2007 Jun

Keywords

Laser ablation
Micromachines
Micromotors
Thick film devices

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10.1109/TMAG.2007.893778

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title = "Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines",

abstract = "Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.",

keywords = "Laser ablation, Micromachines, Micromotors, Thick film devices",

author = "M. Nakano and S. Sato and F. Yamashita and T. Honda and J. Yamasaki and K. Ishiyama and M. Itakura and J. Fidler and T. Yanai and H. Fukunaga",

note = "Funding Information: This work was supported in part by the Ministry of Education, Science, Sports and Culture of Japan under a Grand-in-Aid (16686022, 10136533) and in part by the Energy Use Rationalization Technology and Strategy Developments Program in 2005 from the New Energy and Industrial Technology Development Organization (NEDO, Project P03033) of Japan.",

year = "2007",

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doi = "10.1109/TMAG.2007.893778",

language = "English",

volume = "43",

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AU - Nakano, M.

AU - Sato, S.

AU - Yamashita, F.

AU - Honda, T.

AU - Yamasaki, J.

AU - Ishiyama, K.

AU - Itakura, M.

AU - Fidler, J.

AU - Yanai, T.

AU - Fukunaga, H.

N1 - Funding Information: This work was supported in part by the Ministry of Education, Science, Sports and Culture of Japan under a Grand-in-Aid (16686022, 10136533) and in part by the Energy Use Rationalization Technology and Strategy Developments Program in 2005 from the New Energy and Industrial Technology Development Organization (NEDO, Project P03033) of Japan.

PY - 2007/6

Y1 - 2007/6

N2 - Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

AB - Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

KW - Laser ablation

KW - Micromachines

KW - Micromotors

KW - Thick film devices

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JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 6

ER -

Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

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Keywords

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