Review of the status of LiNbO3 devices and technologies

Hiroshi Mori, Akio Watanabe, Takumi Fujiwara

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we review LiNbO3-based devices and technologies from both materials and device processing techniques. However, all the relevant areas cannot possibly be covered; we limit the scope of the paper to electrooptic devices. Also, we mostly focus on our own activities at Sumitomo Metal Mining. First, materials-related issues such as the uniformity and consistency of the substrate crystal as assessed by the variability of directional coupler coupling length are summarized. The photorefractive damage resistance is also reviewed; the dependence on the substrate quality and input laser wavelength. Second, taking the case of the multi-function gyro chip, we review and discuss the use of both Ti-indiffused and proton-exchanged waveguides on a single chip.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Pages92-100
Number of pages9
ISBN (Print)0819409731
Publication statusPublished - 1993
EventIntegrated Optical Circuits II - Boston, MA, USA
Duration: 1992 Sept 101992 Sept 11

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume1794
ISSN (Print)0277-786X

Conference

ConferenceIntegrated Optical Circuits II
CityBoston, MA, USA
Period92/9/1092/9/11

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