Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: Effects of hydrogenating-gas and thermal history

Hideki Nakazawa; Maki Suemitsu; Nobuo Miyamoto

doi:10.1016/S0039-6028(00)00710-X

Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: Effects of hydrogenating-gas and thermal history

Hideki Nakazawa, Maki Suemitsu, Nobuo Miyamoto

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Hydrogen desorption kinetics from Si(100)-2×1:H has been systematically investigated using temperature-programmed desorption (TPD) on several hydrogenating gases and thermal conditions. As a result, the desorption kinetic order with the hydrogen coverage was found to increase in the order: atomic hydrogen<disilane<silane and room-temperature adsorption<high-temperature adsorption<post-annealing. These variations in kinetic order, depicted as a TPD peak shift at low hydrogen coverages, are universally described with a single surface parameter, γ₀, the fractional coverage of unpaired hydrogen atoms. Fitting with obtained TPD spectra demonstrates that γ₀ is a delicate function of the hydrogenating gas and thermal history.

Original language	English
Pages (from-to)	177-185
Number of pages	9
Journal	Surface Science
Volume	465
Issue number	1-2
DOIs	https://doi.org/10.1016/S0039-6028(00)00710-X
Publication status	Published - 2000 Oct 10
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/S0039-6028(00)00710-X

Cite this

@article{21b2d27290fa40668237e4312651e0dc,

title = "Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: Effects of hydrogenating-gas and thermal history",

abstract = "Hydrogen desorption kinetics from Si(100)-2×1:H has been systematically investigated using temperature-programmed desorption (TPD) on several hydrogenating gases and thermal conditions. As a result, the desorption kinetic order with the hydrogen coverage was found to increase in the order: atomic hydrogen0, the fractional coverage of unpaired hydrogen atoms. Fitting with obtained TPD spectra demonstrates that γ0 is a delicate function of the hydrogenating gas and thermal history.",

author = "Hideki Nakazawa and Maki Suemitsu and Nobuo Miyamoto",

note = "Funding Information: This work was supported in part by a Grant-in-Aid for Scientific Research (No. 09450015) from the Ministry of Education, Science, Sports and Culture, Japan.",

year = "2000",

month = oct,

day = "10",

doi = "10.1016/S0039-6028(00)00710-X",

language = "English",

volume = "465",

pages = "177--185",

journal = "Surface Science",

issn = "0039-6028",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1

T2 - Effects of hydrogenating-gas and thermal history

AU - Nakazawa, Hideki

AU - Suemitsu, Maki

AU - Miyamoto, Nobuo

N1 - Funding Information: This work was supported in part by a Grant-in-Aid for Scientific Research (No. 09450015) from the Ministry of Education, Science, Sports and Culture, Japan.

PY - 2000/10/10

Y1 - 2000/10/10

N2 - Hydrogen desorption kinetics from Si(100)-2×1:H has been systematically investigated using temperature-programmed desorption (TPD) on several hydrogenating gases and thermal conditions. As a result, the desorption kinetic order with the hydrogen coverage was found to increase in the order: atomic hydrogen0, the fractional coverage of unpaired hydrogen atoms. Fitting with obtained TPD spectra demonstrates that γ0 is a delicate function of the hydrogenating gas and thermal history.

AB - Hydrogen desorption kinetics from Si(100)-2×1:H has been systematically investigated using temperature-programmed desorption (TPD) on several hydrogenating gases and thermal conditions. As a result, the desorption kinetic order with the hydrogen coverage was found to increase in the order: atomic hydrogen0, the fractional coverage of unpaired hydrogen atoms. Fitting with obtained TPD spectra demonstrates that γ0 is a delicate function of the hydrogenating gas and thermal history.

UR - http://www.scopus.com/inward/record.url?scp=0034291481&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034291481&partnerID=8YFLogxK

U2 - 10.1016/S0039-6028(00)00710-X

DO - 10.1016/S0039-6028(00)00710-X

M3 - Article

AN - SCOPUS:0034291481

SN - 0039-6028

VL - 465

SP - 177

EP - 185

JO - Surface Science

JF - Surface Science

IS - 1-2

ER -

Role of hydrogen prepairing in the hydrogen desorption kinetics from Si(100)-2×1: Effects of hydrogenating-gas and thermal history

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this