TY - GEN
T1 - Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator
AU - Wang, Shihe
AU - Al Farisi, Muhammad Salman
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). MSAF acknowledges the Division for Interdisciplinary Advanced Research and Education, Tohoku University and Japan Society for the Promotion of Science (JSPS) KAKENHI grant-in-aid for young scientist no. 19J11122.
Publisher Copyright:
© 2020 IEEE.
PY - 2020/3
Y1 - 2020/3
N2 - An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV).
AB - An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV).
KW - Dynamically balanced
KW - Gyroscope
KW - Out-of-Plane
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U2 - 10.1109/INERTIAL48129.2020.9090078
DO - 10.1109/INERTIAL48129.2020.9090078
M3 - Conference contribution
AN - SCOPUS:85085514126
T3 - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
Y2 - 23 March 2020 through 26 March 2020
ER -