Room-temperature bonding of AlN ceramic and Si semiconductor substrates for improved thermal management

Takashi Matsumae, Yuichi Kurashima, Hideki Takagi, Kazunori Nishizono, Tsutomu Amano, Eiji Higurashi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

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