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Room-Temperature Wafer Bonding with Titanium Thin Films Based on Formation of Ti/Si Amorphous Layers
Eiji Higurashi, Hayato Azuma, Michitaka Yamamoto, Takeshi Matsumae, Yuichi Kurashima, Hideki Takagi, Tadatomo Suga
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution