Rotational control of anisotropic micro-objects by optical pressure

Eiji Higurashi, Hiroo Ukita, Hidenao Tanaka, Osamu Ohguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Micro-objects having an anisotropic geometry - not bilateral symmetry but rotational symmetry in the horizontal cross section - were fabricated by reactive ion-beam etching (RIBE) of a 10-μm-thick silicon dioxide layer. These artificial micro-objects, suspended in liquid and irradiated by a strongly focused laser beam, rotated about the laser beam axis in the expected direction and the speed of rotation is proportional to the input laser power.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Rotational control of anisotropic micro-objects by optical pressure'. Together they form a unique fingerprint.

Cite this