Abstract
Micro-objects having an anisotropic geometry - not bilateral symmetry but rotational symmetry in the horizontal cross section - were fabricated by reactive ion-beam etching (RIBE) of a 10-μm-thick silicon dioxide layer. These artificial micro-objects, suspended in liquid and irradiated by a strongly focused laser beam, rotated about the laser beam axis in the expected direction and the speed of rotation is proportional to the input laser power.
| Original language | English |
|---|---|
| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 291-296 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - 1994 |
| Externally published | Yes |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: 1994 Jan 25 → 1994 Jan 28 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering