Rubber-coupled acoustic microscopy for dry inspections of industrial products

Hironori Tohmyoh, Tsuyoshi Akaogi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


This paper describes the transduction of high-frequency ultrasound via rubber membranes. Four kinds of rubber membranes with Young's moduli of 0.91-9.59 MPa and thickness of 0.2 mm are prepared, and the ultrasound exited with the 50 MHz focused ultrasonic transducer is transmitted into the acrylic resin targets with various surface roughness through the membrane/target interfaces with an applied pressure of about 0.1 MPa. The rubber membrane with low Young's modulus realizes small coupling loss at the membrane/target interfaces, and the lateral resolution of the rubber-coupled acoustic microscopy is found to be governed by ultrasonic attenuation in the membrane. Finally, we repeatedly demonstrate the acoustic imaging of a semiconductor package in a dry environment via the selected membrane.

Original languageEnglish
Pages (from-to)368-373
Number of pages6
JournalNDT and E International
Issue number5
Publication statusPublished - 2007 Jul


  • Acoustic coupling
  • Acoustic microscopy
  • Dry-coupling
  • Lateral resolution
  • Rubber membranes
  • Semiconductor package
  • Ultrasonic attenuation
  • Young's modulus

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering


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