Sandwich type ferromagnetic RF integrated inductor

Masahiro Yamaguchi, Makoto Baba, Ken Ichi Arai

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)


First microfabrication of a sandwich type ferromagnetic RF integrated spiral inductor at 2 GHz range is demonstrated. The two ferromagnetic CoNbZr films sandwich the spiral to enhance the number of magnetic flux linkage across the coil current. The inductance, L, of 7.9 nH and the qualify factor, Q, of 12.7 were obtained for a 200 μm × 400 μm size 4-turn rectangular spiral at f=2GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%.

Original languageEnglish
Pages (from-to)185-188
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Publication statusPublished - 2001
EventInternational Microwave Symposium Digest IEEE-MTT-S 2001 - Phoenix, AZ, United States
Duration: 2001 May 202001 May 25


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