Abstract
First microfabrication of a sandwich type ferromagnetic RF integrated spiral inductor at 2 GHz range is demonstrated. The two ferromagnetic CoNbZr films sandwich the spiral to enhance the number of magnetic flux linkage across the coil current. The inductance, L, of 7.9 nH and the qualify factor, Q, of 12.7 were obtained for a 200 μm × 400 μm size 4-turn rectangular spiral at f=2GHz. The inductance was better than that of an air core of the same coil size by 19%, and the Q was better by 23%.
| Original language | English |
|---|---|
| Pages (from-to) | 185-188 |
| Number of pages | 4 |
| Journal | IEEE MTT-S International Microwave Symposium Digest |
| Volume | 3 |
| Publication status | Published - 2001 |
| Event | International Microwave Symposium Digest IEEE-MTT-S 2001 - Phoenix, AZ, United States Duration: 2001 May 20 → 2001 May 25 |