Scanning force microscope technique for adhesion distribution measurement

Minoru Sasaki, Kazuhiro Hane, Shigeru Okuma, Akihiro Torii

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


A scanning force microscope technique is described to study the relation between topography and the local adhesion. The drift has been a main problem in investigating this relation since a long period is required to measure force curves over the scan area. To circumvent this problem, we propose a methodology to detect the topography and the adhesion from force curves simultaneously. Since this information is obtained from the same force curve, the distribution of the tip position corresponds precisely to that of the adhesion. The detailed relation between the tip position and the adhesion is measured on a fine lithographic grating.

Original languageEnglish
Pages (from-to)350-354
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 1995 Mar


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