Scanning probe with an integrated diamond heater element for nanolithography

Joon Hyung Bae; Takahito Ono; Masayoshi Esashi

doi:10.1063/1.1541949

Scanning probe with an integrated diamond heater element for nanolithography

Joon Hyung Bae, Takahito Ono, Masayoshi Esashi

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.

Original language	English
Pages (from-to)	814-816
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	5
DOIs	https://doi.org/10.1063/1.1541949
Publication status	Published - 2003 Feb 3

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10.1063/1.1541949

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title = "Scanning probe with an integrated diamond heater element for nanolithography",

abstract = "The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.",

author = "Bae, {Joon Hyung} and Takahito Ono and Masayoshi Esashi",

year = "2003",

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AU - Ono, Takahito

AU - Esashi, Masayoshi

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Y1 - 2003/2/3

N2 - The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.

AB - The microfabrication, evaluation, and application of a boron-doped diamond microscope was studied using an integrated resistive heater element. The high thermal conductivity of the diamond base supporting the heater element allows quick thermal response of 0.45 μs. A high-speed nanolithography process can be realized due to the large thermal conductivity of diamond probe.

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VL - 82

SP - 814

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Scanning probe with an integrated diamond heater element for nanolithography

Abstract

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