Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup

Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan Liu Chen, Wei Gao

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


A new method, in which the wavefronts of the zero-order and the positive and negative first-order diffracted beams from a planar scale grating in Littrow setup are analyzed by a Fizeau interferometer, is proposed to evaluate the Z-directional out-of-flatness as well as the X- and Y-directional pitch deviations of the planar scale grating over a large area. Meanwhile, the surface profile of the reference optical flat in the Fizeau interferometer can also be determined in a much simpler and more efficient approach than the commonly used liquid-flat reference and three-flat test calibration methods. Simulations are presented to verify the feasibility of the proposed method.

Original languageEnglish
Pages (from-to)21567-21582
Number of pages16
JournalOptics Express
Issue number18
Publication statusPublished - 2017 Sept 4

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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