Self-formation of Ti-rich layers at Cu(Ti)/low-k interfaces

Kazuyuki Kohama, Kazuhiro Ito, Susumu Tsukimoto, Kenichi Mori, Kazuyoshi Maekawa, Masanori Murakami

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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    Chemistry

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    Biochemistry, Genetics and Molecular Biology

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