Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths

Y. Kanamori; N. Matsuyama; J. S. Ye; K. Hane

doi:10.1109/OMEMS.2007.4373859

Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths

Y. Kanamori, N. Matsuyama, J. S. Ye, K. Hane

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860 nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.

Original language	English
Title of host publication	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages	99-100
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2007.4373859
Publication status	Published - 2007 Dec 1
Event	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 2007 Aug 12 → 2007 Aug 16

Publication series

Name	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country/Territory	Taiwan, Province of China
City	Hualien
Period	07/8/12 → 07/8/16

Keywords

Comb-drive actuators
Guided-mode resonant grating filters
Subwavelength gratings
Wavelength-selective filters

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/OMEMS.2007.4373859

Cite this

Kanamori, Y., Matsuyama, N., Ye, J. S., & Hane, K. (2007). Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 99-100). [4373859] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373859

Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths. / Kanamori, Y.; Matsuyama, N.; Ye, J. S. et al.
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 99-100 4373859 (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kanamori, Y, Matsuyama, N, Ye, JS & Hane, K 2007, Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths. in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS., 4373859, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp. 99-100, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, Hualien, Taiwan, Province of China, 07/8/12. https://doi.org/10.1109/OMEMS.2007.4373859

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abstract = "We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860 nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.",

keywords = "Comb-drive actuators, Guided-mode resonant grating filters, Subwavelength gratings, Wavelength-selective filters",

author = "Y. Kanamori and N. Matsuyama and Ye, {J. S.} and K. Hane",

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AB - We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860 nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.

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Self-supported pitch-variable guided-mode resonant grating filters at telecom wavelengths

Abstract

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Keywords

ASJC Scopus subject areas

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