SEM-EDX analysis ofinsulator specimen by using garment antistatic spray

Long Ze, Susumu Imashuku, Jun Kawai

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


SEM-EDX analyses of insulator samples are usually believed to be difficult because of charge-up effect, and thus carbon or gold evaporation was performed prior to the SEM observation. However, such an electric conductive thin film will emit characteristic X-rays, interfering the EDX analysis. In the present study, we report that using an anti-static spray is an easier and more effective way than using an ionic liquid. Possibility of metal corrosion by the anti-static spray should be noted.

Original languageEnglish
Pages (from-to)155-158
Number of pages4
JournalBunseki Kagaku
Issue number2
Publication statusPublished - 2013


  • Antistatic agent
  • Diluted ionic liquid
  • Insulator


Dive into the research topics of 'SEM-EDX analysis ofinsulator specimen by using garment antistatic spray'. Together they form a unique fingerprint.

Cite this