Semiconductor-based field-effect structures for chemical sensing

M. J. Schöning, A. Poghossian, T. Yoshinobu, H. Lüth

Research output: Contribution to journalConference articlepeer-review

18 Citations (Scopus)


Silicon sensors can be fabricated as small, rugged and reliable chip devices with a broad field of applications in medicine, biotechnology, food analysis and environmental monitoring. Thus, there is an increasing demand in realizing such sensors for the determination of, e.g. chemical and biological quantities in aqueous solutions. By developing semiconductor-based field-effect structures, moreover, their main advantage is due to the combination of both the physical effect as the transducer principle and the deposition of the sensitive layers directly onto the silicon chip. In this work, different sensor types that are originated from the field effect are presented: The capacitive EIS (electrolyte-insulator-semiconductor) sensor is suitable for the pH detection using the capacitance/voltage technique. By immobilizing an additional enzyme layer, e.g. of penicillinase, a biosensor has been realized. Both sensors can be integrated as an EIS sensor array. The utilization of the porous silicon technology offers the possibility of a further miniaturization. The LAPS (light-addressable potentiometric sensor) is based on the identical EIS structure. Here, each measuring point on the surface can be arbitrarily addressed by a probing light. The resulting photocurrent is generated as the sensor signal. This arrangement also allows a two-dimensional mapping of the spatial distribution of ions or molecules.

Original languageEnglish
Pages (from-to)188-198
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
EventAdvanced Environmental and Chemical Sensing Technology - Boston, MA, United States
Duration: 2000 Nov 52000 Nov 8


  • Capacitance
  • EIS sensor
  • Field-effect structure
  • LAPS
  • Penicillin
  • pH
  • Photocurrent
  • Sensor array


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