Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

S. Suzuki; S. Tuchitani; K. Sato; S. Ueno; Y. Yokota; M. Sato; M. Esashi

doi:10.1016/0924-4247(90)85063-A

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

S. Suzuki, S. Tuchitani, K. Sato, S. Ueno, Y. Yokota, M. Sato, M. Esashi

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part.

Original language	English
Pages (from-to)	316-319
Number of pages	4
Journal	Sensors and Actuators: A. Physical
Volume	21
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(90)85063-A
Publication status	Published - 1990 Feb
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/0924-4247(90)85063-A

Cite this

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author = "S. Suzuki and S. Tuchitani and K. Sato and S. Ueno and Y. Yokota and M. Sato and M. Esashi",

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AU - Suzuki, S.

AU - Tuchitani, S.

AU - Sato, K.

AU - Ueno, S.

AU - Yokota, Y.

AU - Sato, M.

AU - Esashi, M.

PY - 1990/2

Y1 - 1990/2

N2 - A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part.

AB - A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part.

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Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

Abstract

ASJC Scopus subject areas

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