Shape memory effect and magnetostriction in polycrystalline Ni-Mn-Ga thin film microactuators

M. Kohl; A. Agarwal; V. A. Chernenko; M. Ohtsuka; K. Seemann

doi:10.1016/j.msea.2006.02.062

Shape memory effect and magnetostriction in polycrystalline Ni-Mn-Ga thin film microactuators

M. Kohl, A. Agarwal, V. A. Chernenko, M. Ohtsuka, K. Seemann

Center for Mineral Processing and Metallurgy (CMPM)

Research output: Contribution to journal › Article › peer-review

64 Citations (Scopus)

Abstract

Ni-Mn-Ga cantilever and tensile microactuators are investigated with respect to their thermoelastic and magnetomechanical characteristics. The base materials are either single-layer Ni-Mn-Ga thin films or Ni-Mn-Ga/Mo thin film composites with different compositions and thicknesses up to 10 μm, which have been fabricated by magnetron sputtering. Differential scanning calorimetry measurements of the thin films show the characteristic features of ferromagnetic Heusler alloys exhibiting a martensitic transformation and a ferromagnetic transition well above room temperature. A pronounced temperature-induced shape memory effect is observed in deflection measurements of the microactuators. The maximum recoverable strain is about 0.8%. Magnetostriction measurements of cantilever actuators consisting of Ni-Mn-Ga/Mo thin film composites show a large increase of magnetostrain for decreasing Ni-Mn-Ga film thickness in the submicrometer range.

Original language	English
Pages (from-to)	940-943
Number of pages	4
Journal	Materials Science and Engineering A
Volume	438-440
Issue number	SPEC. ISS.
DOIs	https://doi.org/10.1016/j.msea.2006.02.062
Publication status	Published - 2006 Nov 25

Keywords

Ferromagnetic shape memory alloys
Magnetostriction
Microactuators
Ni-Mn-Ga thin films
Thin film composites

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.msea.2006.02.062

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title = "Shape memory effect and magnetostriction in polycrystalline Ni-Mn-Ga thin film microactuators",

abstract = "Ni-Mn-Ga cantilever and tensile microactuators are investigated with respect to their thermoelastic and magnetomechanical characteristics. The base materials are either single-layer Ni-Mn-Ga thin films or Ni-Mn-Ga/Mo thin film composites with different compositions and thicknesses up to 10 μm, which have been fabricated by magnetron sputtering. Differential scanning calorimetry measurements of the thin films show the characteristic features of ferromagnetic Heusler alloys exhibiting a martensitic transformation and a ferromagnetic transition well above room temperature. A pronounced temperature-induced shape memory effect is observed in deflection measurements of the microactuators. The maximum recoverable strain is about 0.8%. Magnetostriction measurements of cantilever actuators consisting of Ni-Mn-Ga/Mo thin film composites show a large increase of magnetostrain for decreasing Ni-Mn-Ga film thickness in the submicrometer range.",

keywords = "Ferromagnetic shape memory alloys, Magnetostriction, Microactuators, Ni-Mn-Ga thin films, Thin film composites",

author = "M. Kohl and A. Agarwal and Chernenko, {V. A.} and M. Ohtsuka and K. Seemann",

note = "Funding Information: VAC is grateful to Forschungszentrum Karlsruhe for financial support of his stay as a guest scientist. The authors thank V.A. Lvov for stimulating discussions.",

year = "2006",

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doi = "10.1016/j.msea.2006.02.062",

language = "English",

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T1 - Shape memory effect and magnetostriction in polycrystalline Ni-Mn-Ga thin film microactuators

AU - Kohl, M.

AU - Agarwal, A.

AU - Chernenko, V. A.

AU - Ohtsuka, M.

AU - Seemann, K.

N1 - Funding Information: VAC is grateful to Forschungszentrum Karlsruhe for financial support of his stay as a guest scientist. The authors thank V.A. Lvov for stimulating discussions.

PY - 2006/11/25

Y1 - 2006/11/25

N2 - Ni-Mn-Ga cantilever and tensile microactuators are investigated with respect to their thermoelastic and magnetomechanical characteristics. The base materials are either single-layer Ni-Mn-Ga thin films or Ni-Mn-Ga/Mo thin film composites with different compositions and thicknesses up to 10 μm, which have been fabricated by magnetron sputtering. Differential scanning calorimetry measurements of the thin films show the characteristic features of ferromagnetic Heusler alloys exhibiting a martensitic transformation and a ferromagnetic transition well above room temperature. A pronounced temperature-induced shape memory effect is observed in deflection measurements of the microactuators. The maximum recoverable strain is about 0.8%. Magnetostriction measurements of cantilever actuators consisting of Ni-Mn-Ga/Mo thin film composites show a large increase of magnetostrain for decreasing Ni-Mn-Ga film thickness in the submicrometer range.

AB - Ni-Mn-Ga cantilever and tensile microactuators are investigated with respect to their thermoelastic and magnetomechanical characteristics. The base materials are either single-layer Ni-Mn-Ga thin films or Ni-Mn-Ga/Mo thin film composites with different compositions and thicknesses up to 10 μm, which have been fabricated by magnetron sputtering. Differential scanning calorimetry measurements of the thin films show the characteristic features of ferromagnetic Heusler alloys exhibiting a martensitic transformation and a ferromagnetic transition well above room temperature. A pronounced temperature-induced shape memory effect is observed in deflection measurements of the microactuators. The maximum recoverable strain is about 0.8%. Magnetostriction measurements of cantilever actuators consisting of Ni-Mn-Ga/Mo thin film composites show a large increase of magnetostrain for decreasing Ni-Mn-Ga film thickness in the submicrometer range.

KW - Ferromagnetic shape memory alloys

KW - Magnetostriction

KW - Microactuators

KW - Ni-Mn-Ga thin films

KW - Thin film composites

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Shape memory effect and magnetostriction in polycrystalline Ni-Mn-Ga thin film microactuators

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