@article{550ae53d6f804c8db9c4e07bcb30b43c,
title = "Shielded-loop-type onchip magnetic-field probe to evaluate radiated emission from thin-film noise suppressor",
abstract = "A silicon integrated RF magnetic field probe has been designed and microfabricated using CMOS-silicon-on-insulator (SOI) technology with a 0.15-μm design rule on a high-resistivity silicon substrate. The size of the coil window was 180 × 180 μm3. Coil and electrodes were separated by a 530-μm-long stripline so as to avoid stray voltage induction at the electrode portion. This probe was applied to evaluate the radiated emission from a thin-film electromagnetic noise suppressor. It was clarified and shown that the field intensity was suppressed by 4.0 dB at the center of the signal line at 1 GHz.",
keywords = "Amorphous magnetic films, Complementary metal-oxide semiconductor (CMOS) analog integrated circuits (ICs), Electromagnetic radiative interference, Magnetic resonance, Magnetic-field measurement, Packaging",
author = "Masahiro Yamaguchi and Shota Koya and Hideki Torizuka and Satoshi Aoyama and Shoji Kawahito",
note = "Funding Information: ACKNOWLEDGMENT The authors would like to thank METZ2 project members Dr. N. Masuda (NEC Co.) for valuable discussions and comments; M. Okazaki and H. Eifuku (Panasonic Factory Solutions Co.), and S. Kawamoto (Namics Co.) for their help on packaging; and students T. Fukushima, T. Yasui, and A. Ito for their help. The chip fabrication program of VDEC, the University of Tokyo, in collaboration with Oki Electric Industry Co., was used. Jig fabrication was supported by the Machine Shop, Department of Electrical and Computer Engineering (M. Kobayashi) and Innovation Plaza of Tohoku University. This work was supported in part by the Ministry of Internal Affairs and Communications (SCOPE) and the Nationwide Cooperative Research Projects (Res. Inst. Elec. Comm., Tohoku University).",
year = "2007",
month = jun,
doi = "10.1109/TMAG.2007.892998",
language = "English",
volume = "43",
pages = "2370--2372",
journal = "IEEE Transactions on Magnetics",
issn = "0018-9464",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "6",
}