Silicon-based micro/nanomechanics for nanoengineering

Takahito Ono

Silicon-based micro/nanomechanics for nanoengineering

ENG - Mechanical Systems Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .

Original language	English
Pages	1969-1972
Number of pages	4
Publication status	Published - 2005
Event	IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan Duration: 2005 Dec 6 → 2005 Dec 9

Conference

Conference	IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
Country/Territory	Japan
City	Takamatsu
Period	05/12/6 → 05/12/9

Cite this

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title = "Silicon-based micro/nanomechanics for nanoengineering",

abstract = "This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .",

author = "Takahito Ono",

year = "2005",

language = "English",

pages = "1969--1972",

note = "IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 ; Conference date: 06-12-2005 Through 09-12-2005",

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AU - Ono, Takahito

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Y1 - 2005

N2 - This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .

AB - This paper reports on recent development of micro instrumentations based on advanced silicon technologies for nanoengineering and nanoscience. Demonstration of some miniaturized and integrated micro/nanomechanics, including four-terminal microprobes, optical bow-tie probes, nanomechanical sensors, multiprobe for future high-density data storage, and carbon nanotube mechanics and carbon nanotube electron sources for electron emission devices, are presented. .

UR - http://www.scopus.com/inward/record.url?scp=33644602809&partnerID=8YFLogxK

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M3 - Paper

AN - SCOPUS:33644602809

SP - 1969

EP - 1972

T2 - IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005

Y2 - 6 December 2005 through 9 December 2005

ER -

Silicon-based micro/nanomechanics for nanoengineering

Abstract

Conference

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