@inproceedings{07d4a5a26492422fbf3bf264382a51ba,
title = "Silicon bulk micromachining",
author = "Masayoshi Esashi and Yoichi Haga",
year = "2000",
month = jan,
day = "1",
doi = "10.1109/MMB.2000.893730",
language = "English",
series = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "7--12",
editor = "Andre Dittmar and David Beebe",
booktitle = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
note = "1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, MMB 2000 ; Conference date: 12-10-2000 Through 14-10-2000",
}