Silicon Micromachined Two-Dimensional Galvano Optical Scanner

N. Asada, H. Matsuki, K. Minami, M. Esashi

Research output: Contribution to journalArticlepeer-review

139 Citations (Scopus)


A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

Original languageEnglish
Pages (from-to)4647-4649
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number6
Publication statusPublished - 1994 Nov


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