Silicon Micromachined Two-Dimensional Galvano Optical Scanner

N. Asada; H. Matsuki; K. Minami; M. Esashi

doi:10.1109/20.334177

Silicon Micromachined Two-Dimensional Galvano Optical Scanner

N. Asada, H. Matsuki, K. Minami, M. Esashi

IRIDeS - Resilient EICT Research Promotion Office

Tohoku University

Research output: Contribution to journal › Article › peer-review

139 Citations (Scopus)

Abstract

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

Original language	English
Pages (from-to)	4647-4649
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	30
Issue number	6
DOIs	https://doi.org/10.1109/20.334177
Publication status	Published - 1994 Nov

Access to Document

10.1109/20.334177

Cite this

@article{e48fca8d992640788f94ca95b5f6aad1,

title = "Silicon Micromachined Two-Dimensional Galvano Optical Scanner",

abstract = "A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.",

author = "N. Asada and H. Matsuki and K. Minami and M. Esashi",

year = "1994",

month = nov,

doi = "10.1109/20.334177",

language = "English",

volume = "30",

pages = "4647--4649",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "6",

}

TY - JOUR

T1 - Silicon Micromachined Two-Dimensional Galvano Optical Scanner

AU - Asada, N.

AU - Matsuki, H.

AU - Minami, K.

AU - Esashi, M.

PY - 1994/11

Y1 - 1994/11

N2 - A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

AB - A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil.

UR - http://www.scopus.com/inward/record.url?scp=0028547638&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028547638&partnerID=8YFLogxK

U2 - 10.1109/20.334177

DO - 10.1109/20.334177

M3 - Article

AN - SCOPUS:0028547638

SN - 0018-9464

VL - 30

SP - 4647

EP - 4649

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 6

ER -

Silicon Micromachined Two-Dimensional Galvano Optical Scanner

Abstract

Access to Document

Other files and links

Fingerprint

Cite this