Silicon micromachining and micromachines

M. Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.

Original languageEnglish
Pages (from-to)181-187
Number of pages7
Issue number1-2
Publication statusPublished - 1993 Sept 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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