Silicon micromachining and micromachines

M. Esashi

doi:10.1016/0043-1648(93)90215-8

Silicon micromachining and micromachines

M. Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.

Original language	English
Pages (from-to)	181-187
Number of pages	7
Journal	WEAR
Volume	168
Issue number	1-2
DOIs	https://doi.org/10.1016/0043-1648(93)90215-8
Publication status	Published - 1993 Sept 1

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/0043-1648(93)90215-8

Cite this

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title = "Silicon micromachining and micromachines",

abstract = "Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.",

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AB - Advanced principles of integrated circuit fabrication can be applied for three-dimensional microstructures. This technology based on photofabrication is called micromachining. The micromachining makes it possible to fabricate micromachines which have sensors, actuators and electronic circuits on a silicon wafer. Microflow control systems and integrated mechanical sensors were fabricated. Micromachining and micromachines of silicon are reviewed.

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Silicon micromachining and micromachines

Abstract

ASJC Scopus subject areas

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