@inproceedings{505948eb766e494eaf0887a8bb5879f0,
title = "Silicon microring resonator connected with submicorn comb actuator",
abstract = "A 500nm wide 260nm thick 63.4μm long silicon microring waveguide was suspended in air by connecting to a comb actuator with the low-loss suspension arms. The airgap between the microring and the input/output waveguides was adjusted by a voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input to the drop waveguides was varied from 0% at the gap of 750nm to 50% maximum value (about 30dB) at the voltages from 0V to 28V. Under the drop condition, the bandwidth of the drop signal was 0.5nm, corresponding to the Q-value of 3100.",
keywords = "Comb actuator, Microring, Silicon photonics, Silicon waveguide",
author = "K. Takahashi and Y. Kanamori and K. Hane",
year = "2008",
doi = "10.1109/OMEMS.2008.4607809",
language = "English",
isbn = "9781424419180",
series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
pages = "23--24",
booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",
note = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS ; Conference date: 11-08-2008 Through 14-08-2008",
}