Silicon self-suspended resonant grating filters at telecommunication wavelength

Jia Sheng Ye; Naoki Matsuyama; Yoshiaki Kanamori; Kazuhiro Hane

doi:10.1109/CLEO.2008.4551736

Silicon self-suspended resonant grating filters at telecommunication wavelength

Jia Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.

Original language	English
Title of host publication	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOIs	https://doi.org/10.1109/CLEO.2008.4551736
Publication status	Published - 2008
Event	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States Duration: 2008 May 4 → 2008 May 9

Publication series

Name	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

Conference

Conference	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
Country/Territory	United States
City	San Jose, CA
Period	08/5/4 → 08/5/9

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10.1109/CLEO.2008.4551736

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Ye, J. S., Matsuyama, N., Kanamori, Y., & Hane, K. (2008). Silicon self-suspended resonant grating filters at telecommunication wavelength. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS Article 4551736 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). https://doi.org/10.1109/CLEO.2008.4551736

Ye, Jia Sheng ; Matsuyama, Naoki ; Kanamori, Yoshiaki et al. / Silicon self-suspended resonant grating filters at telecommunication wavelength. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS).

@inproceedings{7a30687fb0b24ad090af56e524778a7a,

title = "Silicon self-suspended resonant grating filters at telecommunication wavelength",

abstract = "A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.",

author = "Ye, {Jia Sheng} and Naoki Matsuyama and Yoshiaki Kanamori and Kazuhiro Hane",

year = "2008",

doi = "10.1109/CLEO.2008.4551736",

language = "English",

isbn = "1557528594",

series = "2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS",

booktitle = "2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS",

note = "Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 ; Conference date: 04-05-2008 Through 09-05-2008",

}

Ye, JS, Matsuyama, N, Kanamori, Y & Hane, K 2008, Silicon self-suspended resonant grating filters at telecommunication wavelength. in 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS., 4551736, 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS, Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008, San Jose, CA, United States, 08/5/4. https://doi.org/10.1109/CLEO.2008.4551736

Silicon self-suspended resonant grating filters at telecommunication wavelength. / Ye, Jia Sheng; Matsuyama, Naoki; Kanamori, Yoshiaki et al.
2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551736 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Silicon self-suspended resonant grating filters at telecommunication wavelength

AU - Ye, Jia Sheng

AU - Matsuyama, Naoki

AU - Kanamori, Yoshiaki

AU - Hane, Kazuhiro

PY - 2008

Y1 - 2008

N2 - A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.

AB - A silicon self-suspended grating was fabricated using nanolithography technology. Experimental results showed that it served as an optical filter through guide mode resonance, which agreed with theoretical simulations by rigorous coupled wave method.

UR - http://www.scopus.com/inward/record.url?scp=51349130631&partnerID=8YFLogxK

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U2 - 10.1109/CLEO.2008.4551736

DO - 10.1109/CLEO.2008.4551736

M3 - Conference contribution

AN - SCOPUS:51349130631

SN - 1557528594

SN - 9781557528599

T3 - 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

BT - 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

T2 - Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008

Y2 - 4 May 2008 through 9 May 2008

ER -

Ye JS, Matsuyama N, Kanamori Y , Hane K. Silicon self-suspended resonant grating filters at telecommunication wavelength. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551736. (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). doi: 10.1109/CLEO.2008.4551736

Silicon self-suspended resonant grating filters at telecommunication wavelength

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