Abstract
Silicon single crystal fibers with a constant diameter as small as 200 μm have been successfully grown by the micro pulling down technique. Grown crystal fibers are uniform in shape and contain a large defect-free volume. Basic parameters for stable growth were discussed in association with the conservation of mass and heat as well as the meniscus stability of the molten zone.
Original language | English |
---|---|
Pages (from-to) | L793-L795 |
Journal | Japanese Journal of Applied Physics |
Volume | 35 |
Issue number | 6 B |
DOIs | |
Publication status | Published - 1996 |