Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

Jia Sheng Ye; Naoki Matsuyama; Yoshiaki Kanamori; Kazuhiro Hane

doi:10.1109/LPT.2008.921840

Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

Jia Sheng Ye, Naoki Matsuyama, Yoshiaki Kanamori, Kazuhiro Hane

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithograph- technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations b- a rigorous coupled wave method prove to be in agreement with the experimental observations.

Original language	English
Pages (from-to)	851-853
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	20
Issue number	10
DOIs	https://doi.org/10.1109/LPT.2008.921840
Publication status	Published - 2008 May 15

Keywords

Guided mode resonance
Micro- and nanolithograph- technologies
Microoptical filter
Rigorous coupled wave method

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Access to Document

10.1109/LPT.2008.921840

Cite this

@article{adb61f732cf442a9a7e26e6775df07ad,

title = "Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer",

abstract = "In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithograph- technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations b- a rigorous coupled wave method prove to be in agreement with the experimental observations.",

keywords = "Guided mode resonance, Micro- and nanolithograph- technologies, Microoptical filter, Rigorous coupled wave method",

author = "Ye, {Jia Sheng} and Naoki Matsuyama and Yoshiaki Kanamori and Kazuhiro Hane",

note = "Funding Information: Manuscript received December 7, 2007; revised January 31, 2008. This work was supported by a Grant-in-Aid for Scientific Research (17068002), and also by a Grant-in-Aid for Publication of Scientific Research Results ( ) from the Japan Society for the Promotion of Science (JSPS).",

year = "2008",

month = may,

day = "15",

doi = "10.1109/LPT.2008.921840",

language = "English",

volume = "20",

pages = "851--853",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "10",

}

TY - JOUR

T1 - Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

AU - Ye, Jia Sheng

AU - Matsuyama, Naoki

AU - Kanamori, Yoshiaki

AU - Hane, Kazuhiro

N1 - Funding Information: Manuscript received December 7, 2007; revised January 31, 2008. This work was supported by a Grant-in-Aid for Scientific Research (17068002), and also by a Grant-in-Aid for Publication of Scientific Research Results ( ) from the Japan Society for the Promotion of Science (JSPS).

PY - 2008/5/15

Y1 - 2008/5/15

N2 - In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithograph- technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations b- a rigorous coupled wave method prove to be in agreement with the experimental observations.

AB - In this letter, a silicon suspended grating without a substrate is fabricated using micro- and nanolithograph- technologies. Experimental measurements reveal that it serves as a microoptical filter, which is due to guided mode resonance effect of the grating. Theoretical calculations b- a rigorous coupled wave method prove to be in agreement with the experimental observations.

KW - Guided mode resonance

KW - Micro- and nanolithograph- technologies

KW - Microoptical filter

KW - Rigorous coupled wave method

UR - http://www.scopus.com/inward/record.url?scp=65249106117&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65249106117&partnerID=8YFLogxK

U2 - 10.1109/LPT.2008.921840

DO - 10.1109/LPT.2008.921840

M3 - Article

AN - SCOPUS:65249106117

SN - 1041-1135

VL - 20

SP - 851

EP - 853

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 10

ER -

Silicon suspended resonant grating filters fabricated from a silicon-on-insulator wafer

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this